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Circular SAW Resonators: Influence of Sensitive Element Dimensions on Strength Characteristics and First Experimental

Sergey Yu Shevchenko1, Denis A Mikhailenko1, Alexander S Kukaev1

  • 1Department of Laser Measuring and Navigation Systems, Faculty of Information Measurement and Biotechnical Systems, Saint Petersburg Electrotechnical University (LETI), Popova Str., h. 5, 197376 Saint Petersburg, Russia.

Sensors (Basel, Switzerland)
|July 27, 2024
PubMed

Keywords:
interdigital transducermicroelectromechanical systemsmicromechanical accelerometerresonatorsensitive elementsurface acoustic waves

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