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Updated: Jun 18, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Simulation of Modal Control of Metal Mode-Filtered Vertical-Cavity Surface-Emitting Laser.
Jingfei Mu1,2, Yinli Zhou1, Chao Chen1
1Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence Science and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
A new metal-dielectric film filter flexibly controls transverse modes in vertical-cavity surface-emitting lasers (VCSELs). Adjusting aperture parameters offers precise optical mode control for VCSEL applications.
Area of Science:
- Optics and Photonics
- Semiconductor Devices
Background:
- Vertical-cavity surface-emitting lasers (VCSELs) are crucial components in optical communication and sensing.
- Controlling transverse modes in VCSELs is essential for optimizing device performance and beam quality.
Purpose of the Study:
- To propose and theoretically analyze a novel metal-dielectric film mode filter structure.
- To demonstrate flexible regulation of transverse modes within VCSELs.
Main Methods:
- Development of a metal-dielectric film mode filter structure.
- Simulation and theoretical analysis of the filter's effect on VCSEL transverse modes.
- Definition of a new parameter for mode identification.
Main Results:
- The proposed filter enables flexible adjustment of the number, volume, and stability of transverse modes.
- Control is achieved by tuning three key parameters: oxide aperture, metal aperture, and their separation distance.
- A flexible window for mode control is established.
Conclusions:
- The study provides a robust theoretical foundation and calculation methodology for optical mode control in VCSELs.
- The novel filter design offers significant potential for enhancing VCSEL performance and applications.
- This work contributes to the advancement of tunable laser technology.
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