High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition

Area of Science:

• Inorganic Chemistry
• Materials Science
• Coordination Chemistry

Background:

• Antimony(III) complexes are of interest due to their diverse applications.
• Developing novel complexes with tailored properties is crucial for advancing materials science.

Purpose of the Study:

• To synthesize and characterize new antimony(III) complexes.
• To investigate the structural, thermal, and volatility properties of these novel compounds.

Main Methods:

• Salt-elimination reaction using antimony(III) chloride and sodium-substituted carboxamides.
• X-ray crystallography for structural determination.
• Thermogravimetric analysis (TGA) for thermal stability and volatility assessment.

Main Results:

• Six novel antimony(III) complexes, Sb(mpa)3 to Sb(edpa)3, were successfully synthesized.
• X-ray crystallography confirmed a distorted pentagonal bipyramidal geometry for Sb(edpa)3 (6).
• Complex 4 exhibited exceptional volatility with a low residual mass (0.16% at 500 °C) and favorable vaporization enthalpy.

Conclusions:

• The synthesized antimony(III) complexes possess unique structural and thermal properties.
• The excellent volatility and low residue of complex 4 suggest its potential utility in applications requiring high-temperature processing.
• Further research into the applications of these novel antimony complexes is warranted.