Challenges to extracting spatial information about double P dopants in Si from STM images

Piotr T Różański1, Garnett W Bryant2, Michał Zieliński3

  • 1Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Toruń, Toruń, Poland.

Scientific Reports
|August 5, 2024
PubMed
Summary

Determining phosphorous dopant positions in silicon using scanning tunneling microscopy (STM) is complex for double-dopant systems. This study introduces a novel method to accurately locate paired dopants, overcoming ambiguities in STM imaging for nanoscale device fabrication.