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Updated: Jun 16, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Control over the spatial correlation of perforations in silica thin films as a function of solution conditions
Julien Castets1, Louise Labeyrie1, Estelle Morvan2
1CNRS, Univ. Bordeaux, Bordeaux INP, ICMCB, UMR5026, F-33600 Pessac, France. lucien.roach@ens-lyon.fr.
Abstract:
A perforated silica layer with structural correlation is engineered using sol-gel chemistry, applied to large-scale flat and curved surfaces. The anion(s) used in the preparation give tailored spatial correlation, and control over perforation size and density. Surface structuration is rapidly and reproducibly created using water and salts as inexpensive and ecofriendly reagents.
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