Microelectromechanical System-Based Reconfigurable Terahertz Metamaterial for Polarization Filter, Switch, and Logic...

Area of Science:

• Terahertz (THz) Photonics
• Metamaterials
• Microelectromechanical Systems (MEMS)

Background:

• Terahertz (THz) metamaterials integrated with microelectromechanical systems (MEMS) enable dynamic control over THz wave properties.
• Existing technologies offer limited real-time modulation capabilities for THz waves.

Purpose of the Study:

• To demonstrate a MEMS-based reconfigurable THz metamaterial (RTM) for real-time THz wave modulation.
• To investigate the polarization-dependent and voltage-actuated tuning of THz wave properties.
• To explore the potential of RTMs for logic gate operations.

Main Methods:

• Fabrication of a MEMS-based RTM utilizing a split ring resonator (SRR).
• Characterization of THz wave modulation by varying incident polarization angle and DC bias voltage.
• Analysis of resonant frequency shifts and modulation depth.
• Implementation and testing of logic gate functionalities (NAND, AND).

Main Results:

• The SRR resonant frequency shifts from 0.74 to 1.16 THz with increasing polarization angle.
• A maximum modulation depth exceeding 70% was achieved.
• Polarization-dependent transmission intensity and resonant frequency were actively tuned via DC bias.
• Demonstrated logic gate operations: NAND at 0.439 THz and AND at 0.732 THz.

Conclusions:

• The MEMS-based RTM offers dynamic and reconfigurable control of THz wave amplitude, phase, and polarization.
• The device exhibits potential for implementing THz logic gates and modulators.
• Proposed RTM has applications in tunable filters, optical switches, and programmable logic devices.