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Three-Dimensional Metallic Surface Micropatterning through Tailored Photolithography-Transfer-Plating.
Liyang Chen1, Julian Schmid1, Anetta Platek-Mielczarek1
1Laboratory for Multiphase Thermofluidics and Surface Nanoengineering, Department of Mechanical and Process Engineering, ETH Zurich, Sonneggstrasse 3, CH-8092 Zurich, Switzerland.
ACS Applied Materials & Interfaces
|August 20, 2024
Summary
A new photolithography-transfer-plating method creates durable micropatterns on 3D metal surfaces. This technique enables precise control and enhances applications in microelectronics and energy, overcoming weak adhesion issues of traditional methods.
Area of Science:
- Materials Science and Engineering
- Surface Science
- Nanotechnology
Background:
- Precise micropatterning on three-dimensional (3D) surfaces is crucial for advanced applications like microelectronics and metamaterials.
- Existing transfer printing techniques suffer from weak adhesion of transferred microstructures, limiting their use to force-free environments.
- There is a need for scalable methods to create stable and durable micropatterns on complex 3D metallic surfaces.
Purpose of the Study:
- To develop a scalable method for creating stable and durable micropatterns on 3D metallic surfaces with precise dimensional and location control.
- To demonstrate the versatility of the method on various metallic substrates with different curvatures and materials.
- To showcase the potential of these micropatterned surfaces in energy applications.
Main Methods:
- A novel "photolithography-transfer-plating" method was developed for micropatterning.
- The technique was applied to 3D metallic surfaces with varying curvatures and compositions.
- Hierarchical structures with nanoscale vertical and microscale horizontal dimensions were fabricated.
Main Results:
- Stable and durable micropatterns were successfully fabricated on 3D metallic surfaces with precise control over dimensions and location.
- The method demonstrated applicability across different metals and surface curvatures (isotropic and anisotropic).
- Plated patterns exhibited sufficient stability for molding soft materials and passed 24-hour thermofluidic durability tests.
- Micropatterned nickel electrodes were created, showing enhanced oxygen evolution reaction for hydrogen production.
Conclusions:
- The photolithography-transfer-plating method offers a scalable solution for durable micropatterning on 3D metallic surfaces.
- This technique overcomes the limitations of weak adhesion in conventional transfer printing.
- The developed micropatterned 3D metallic surfaces hold significant potential for energy applications, such as improved hydrogen production catalysts.

