Subwavelength Grating Cascaded Microring Resonator Biochemical Sensors with Record-High Sensitivity

Photonic integrated circuit biochemical and biomedical sensors show promising applications in medical diagnosis, food security, healthcare, and environmental monitoring. Silicon-on-insulator subwavelength grating waveguides and cascaded microring resonator structures enhance photon-analyte interaction, offering superior sensing performance (higher sensitivity with lower limit of detection and larger free spectral range) compared to traditional strip and slot waveguide microring resonator structures. In this study, we design, simulate, and experimentally demonstrate a novel and compact biochemical sensor integrating subwavelength grating cascaded microring resonators and multibox subwavelength grating straight waveguides on a silicon-on-insulator platform. We achieve a record-high refractive index sensitivity of 810 nm/RIU with a limit of detection value of 2.04 × 10^-5 RIU. The measured concentration sensitivity for sodium chloride solutions is 1430 pm/% with a limit of detection of 0.04%. The free spectral range is 35.8 nm, and the measured Q factor is 1.9 × 10³. By combining the advantages of cascaded microring resonators with those subwavelength gratings, our sensor offers unprecedented sensitivity for biochemical sensing applications, promising significant enhancements in healthcare diagnostics and environmental monitoring systems.