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Signal generation in dynamic interferometric displacement detection.

Knarik Khachatryan¹, Simon Anter¹, Michael Reichling¹

¹Institut für Physik, Universität Osnabrück, Barbarastr. 7, 49076 Osnabrück, Germany.

Beilstein Journal of Nanotechnology

|August 27, 2024

Summary

This study analyzes the non-linear response of laser interferometers in non-contact atomic force microscopy (NC-AFM). We show that fitting a model to the time-domain signal precisely calibrates cantilever oscillation amplitude.

Keywords:

NC-AFM amplitude calibration displacement detection force microscopy interferometer signal

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Area of Science:

Physics
Metrology
Surface Science

Background:

Laser interferometry is crucial for precise displacement measurements.
In non-contact atomic force microscopy (NC-AFM), interferometry measures microcantilever displacement for force sensing.

Purpose of the Study:

To investigate the non-linear signal generation in a Michelson-type interferometer used in NC-AFM.
To develop a method for precise calibration of cantilever oscillation amplitude.

Main Methods:

Evaluating the non-linear response of the interferometer to harmonic cantilever displacement in the time domain.
Fitting a mathematical model to the measured time-domain interferometric signal.

Main Results:

Increasing cantilever oscillation amplitude leads to a complex temporal structure in the interferometer signal due to spatial periodicity limitations.
Precise determination of all parameters governing the interferometric displacement signal is achieved through model fitting.
Cantilever oscillation amplitude calibration with 2% accuracy is demonstrated.

Conclusions:

The analysis of non-linear interferometer response provides a robust method for NC-AFM characterization.
Accurate calibration of cantilever oscillation amplitude is essential for reliable force measurements in NC-AFM.