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Instrument Calibration

Instrument Calibration

Instrument calibration is essential for ensuring that instruments produce accurate and consistent results. It is vital in manufacturing, healthcare, testing laboratories, and scientific research. Calibration processes are specific to each instrument and help enhance data accuracy. Each instrument has a unique calibration process tailored to its design and function to improve data accuracy.
Analytical Balance Calibration
An analytical balance measures mass and requires regular calibration to...

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Calibration of piezo actuators and systems by dynamic interferometry.

Knarik Khachatryan¹, Michael Reichling¹

¹Institut für Physik, Universität Osnabrück, Barbarastr. 7, 49076 Osnabrück, Germany.

Beilstein Journal of Nanotechnology

|November 26, 2025

Summary

We present a new method for calibrating piezo actuators in atomic force microscopy using fiber interferometer signals. This technique accurately measures displacements and oscillation amplitudes, crucial for high-precision microscopy.

Keywords:

NC-AFM cantilever excitation fiber interferometer non-contact atomic force microscopy piezo calibration

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Area of Science:

Physics
Materials Science
Nanotechnology

Background:

Precise positioning of components is essential for non-contact atomic force microscopy (AFM) measurements.
Piezo actuators, such as tube piezos, are commonly used for high-accuracy positioning of the AFM tip or optics.

Purpose of the Study:

To develop and validate a novel calibration method for piezo actuators in AFM.
To calibrate the fine-positioning z-piezo and cantilever oscillation amplitude using dynamic response signals.

Main Methods:

Utilized a fiber interferometer for cantilever displacement detection.
Analyzed the dynamic interferometer response signal under varying cantilever oscillation amplitudes and distances.
Recorded data for different tube piezo contractions and extensions.

Main Results:

Successfully calibrated the fine-positioning z-piezo based on the dynamic interferometer response.
Demonstrated accurate calibration of cantilever oscillation amplitude.
Evaluated the accuracy, merits, and limitations of the proposed calibration approach.

Conclusions:

The proposed method offers a reliable approach for calibrating piezo actuators in AFM.
This technique enhances the precision of displacement measurements in AFM applications.
The study discusses the practical implications and accuracy boundaries for this calibration method.