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Updated: Jun 14, 2025

Scanning-probe Single-electron Capacitance Spectroscopy
Published on: July 30, 2013
Charge Trapping and Emission during Bias Temperature Stressing of Schottky Gate GaN-on-Silicon HEMT Structures
Barry O'Sullivan1, Aarti Rathi1, Alireza Alian1
1IMEC, Kapeldreef 75, 3001 Leuven, Belgium.
Abstract:
For operation as power amplifiers in RF applications, high electron mobility transistor (HEMT) structures are subjected to a range of bias conditions, applied at both the gate and drain terminals, as the device is biased from the OFF- to ON-state conditions. The stability of the device threshold voltage (Vt) condition is imperative from a circuit-design perspective and is the focus of this study, where stresses in both the ON and OFF states are explored. We see rapid positive threshold voltage increases under negative bias stress and subsequent recovery (i.e., Vt reduces), whereas conversely, we see a negative Vt shift under positive stress and Vt increase during the subsequent relaxation phase. These effects are correlated with the thickness of the GaN layer and ultimately result from the deep carbon-acceptor levels in the C-GaN back barrier incorporated to screen the buffer between the silicon substrate and the epitaxially grown GaN layer. Methods to mitigate this effect are explored, and the consequences are discussed.
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