Experimental and Theoretical Analysis of Rayleigh and Leaky-Sezawa Waves Propagating in ZnO/Fused Silica Substrates

Piezoelectric c-axis oriented zinc oxide (ZnO) thin films, from 1.8 up to 6.6 µm thick, have been grown by the radio frequency magnetron sputtering technique onto fused silica substrates. A delay line consisting of two interdigital transducers (IDTs) with wavelength λ = 80 µm was photolithographically implemented onto the surface of the ZnO layers. Due to the IDTs' split-finger configuration and metallization ratio (0.5), the propagation of the fundamental, third, and ninth harmonic Rayleigh waves is excited; also, three leaky surface acoustic waves (SAWs) were detected travelling at a velocity close to that of the longitudinal bulk wave in SiO₂. The acoustic waves' propagation in ZnO/fused silica was simulated by using the 2D finite-element method (FEM) technique to identify the nature of the experimentally detected waves. It turned out that, in addition to the fundamental and harmonic Rayleigh waves, high-frequency leaky surface waves are also excited by the harmonic wavelengths; such modes are identified as Sezawa waves under the cut-off, hereafter named leaky Sezawa (LS). The velocities of all the modes was found to be in good agreement with the theoretically calculated values. The existence of a low-loss region in the attenuation vs. layer thickness curve for the Sezawa wave below the cut-off was theoretically predicted and experimentally assessed.