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A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings
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Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review

Chenguang Xin1,2,3, Yingkun Xu1, Zhongyao Zhang1

  • 1School of Instrument and Electronics, North University of China, Taiyuan 030051, China.

Micromachines
|August 29, 2024
PubMed

Keywords:
MOEMSdisplacementoptical sensing

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