Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity-Optimized Based on BP and NSGA-II Algorithms

Area of Science:

• Mechanical Engineering
• Electrical Engineering
• Materials Science

Background:

• Resonant accelerometers require high immunity and low cross-axis sensitivity for applications like seismic monitoring, automotive safety, and navigation.
• Existing designs often face challenges with mode coupling and achieving precise detection.

Purpose of the Study:

• To propose and optimize a novel resonant Micro-Electro-Mechanical Systems (MEMS) accelerometer with low cross-axis sensitivity and high interference immunity.
• To enhance detection accuracy for critical sensing applications.

Main Methods:

• Introduction of a coupling structure to prevent mode coupling by separating resonator mode frequencies.
• Implementation of a decoupling structure to improve detection accuracy and reduce cross-axis sensitivity.
• Optimization of structural parameters using the BP and NSGA-II algorithms.

Main Results:

• The optimized accelerometer exhibits axial stiffness of 6032.21 N/m and transverse stiffness of 6.29 N/m.
• Sensitivity achieved is 59.1 Hz/g (Y-axis) and 59 Hz/g (X-axis).
• Cross-axis sensitivity is significantly reduced to 0.508% (Y-axis) and 0.339% (X-axis).

Conclusions:

• The proposed coupling structure and optimization methodology offer a viable solution for developing resonant accelerometers with superior interference immunity and low cross-axis sensitivity.
• The optimized design meets the stringent requirements for high-performance sensing in demanding environments.