Development of a Fast Positioning Platform with a Large Stroke Based on a Piezoelectric Actuator for Precision...

In this paper, a fast positioning platform (FPP) is proposed, able to meet simultaneously the requirements of large stroke and high frequency response, developed based on a PZT (piezoelectric actuator) and a quad-parallel flexible mechanism, for application in precision machining. The FPP is driven by a high-stiffness PZT and guided by a flexible hinge-based mechanism with a quad-parallel flexible hinge. The proposed quad-parallel flexible hinge mechanism can provide excellent planar motion capability with high stiffness and good guiding performance, thus guaranteeing outstanding dynamics characteristics. The mechanical model was established, the input and output characteristics of the FPP were analyzed, and the working range (output displacement and frequency) of the FPP was determined. Based on the mechanical model and the input and output characteristics of the FPP, the design method is described for of the proposed FPP, which is capable of achieving a large stroke while responding at a high frequency. The characteristics of the FPP were investigated using finite element analysis (FEA). Experiments were conducted to examine the performance of the FPP; the natural frequency of the FPP was 1315.6 Hz, while the maximum output displacement and the motion resolution of the FPP in a static state were 53.13 μm and 5 nm, respectively. Step response testing showed that under a step magnitude of 50 μm, the stabilization times for the falling and rising edges of the moving platform were 37 ms and 26 ms, respectively. The tracking errors were about ±1.96 μm and ±0.59 μm when the amplitude and frequency of the signal were 50 μm, 50 Hz and 10 μm, 200 Hz, respectively. The FPP showed excellent performance in terms of fast response and output displacement. The cutting test results indicated that compared with the uncontrolled condition, the values of surface roughness under controlled conditions decreased by 23.9% and 12.7% when the cutting depths were 5 μm and 10 μm, respectively. The developed FPP device has excellent precision machining performance.