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Robust Pixel Design Methodologies for a Vertical Avalanche Photodiode (VAPD)-Based CMOS Image Sensor
Akito Inoue1, Naoki Torazawa1, Shota Yamada1
1Panasonic Industry Co., Ltd., 1006, Oaza Kadoma, Kadoma-shi 571-8506, Osaka, Japan.
Sensors (Basel, Switzerland)
|August 29, 2024
Summary
This study introduces a new pixel design for vertical avalanche photodiode-based CMOS image sensors. The design ensures stable operation under varying conditions and intense light, improving performance and reliability.
Area of Science:
- Solid-state physics
- Image sensor technology
- Microelectronics engineering
Background:
- Traditional CMOS image sensors face challenges with pixel isolation, sensitivity to environmental variations, and performance under intense light.
- Vertical avalanche photodiodes (VAPDs) offer potential for enhanced sensitivity but require robust pixel design for practical application.
Purpose of the Study:
- To develop and validate a robust pixel design methodology for VAPD-based CMOS image sensors.
- To address critical practical factors including guard-ring-free isolation, insensitivity to voltage/temperature, and stable operation under intense illumination.
Main Methods:
- Developed a guard-ring-free pixel isolation layout by optimizing the trade-off between electric field concentration and isolation.
- Implemented a global feedback resistor to suppress variations in photon detection efficiency and dark count rate.
- Introduced an in-pixel overflow transistor to improve resistance to strong illumination.
Main Results:
- The guard-ring-free design was validated through simulation and experimental characterization.
- Global feedback effectively minimized device characteristic variations across different voltages and temperatures.
- The fabricated VAPD-CIS demonstrated robust performance, verified by testing 122 chips and a 1000-hour high-temperature/intense-light test.
Conclusions:
- The proposed pixel design methodology significantly enhances the robustness and stability of VAPD-based CMOS image sensors.
- The design overcomes key limitations, enabling reliable sensor operation in demanding environmental conditions and high light intensities.
Keywords:
CMOS image sensors (CISs)guard ringrobust pixel designsingle-photon avalanche diodes (SPADs)time-of-flight sensors
