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Fabrication of Silica Ultra High Quality Factor Microresonators
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Ultra-low loss silicon nitride becomes even cooler
Dawn T H Tan1,2, Xavier X Chia3
1Photonics Devices and Systems Group, Singapore University of Technology and Design, Singapore, Singapore. dawn_tan@sutd.edu.sg.
Light, Science & Applications
|September 4, 2024
Abstract:
Ultra-low loss silicon nitride realized using deuterated precursors and low thermal budgets well within backend-of-line CMOS processing may accelerate widespread proliferation of their use.
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