A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging

Area of Science:

• Biomedical Engineering
• Ultrasound Technology
• Microelectromechanical Systems (MEMS)

Background:

• Wearable ultrasound imaging is vital for continuous deep-tissue monitoring but faces limitations in temporal resolution and volumetric coverage with 2D imaging.
• Existing 1D transducer arrays struggle with the trade-off between imaging speed and full 3D views, hindering the interpretation of internal organ dynamics.
• High driving voltages in current technologies limit their practical application in wearable devices.

Purpose of the Study:

• To develop a low-voltage, chip-compatible 2D ultrasonic phased-array transducer for fast 3D volumetric imaging.
• To overcome the limitations of existing ultrasound technologies for continuous deep-tissue monitoring in wearable applications.
• To demonstrate the feasibility of a novel pMUT array design for high-speed, deep-tissue imaging.

Main Methods:

• Utilized microelectromechanical system (MEMS) technology to create a 2D piezoelectric micromachined ultrasound transducer (pMUT) array.
• Implemented an innovative cell-element-array design, grouping pMUT cells for quantitative coupling effect characterization.
• Achieved 3D imaging with a low 5-V actuation voltage.

Main Results:

• The pMUT array demonstrated fast volumetric imaging with a 40mm x 40mm x 70mm coverage range.
• A high temporal frame rate of 11 kHz was achieved, enabling rapid data acquisition.
• Successful imaging was performed in wire and vascular phantoms, validating the technology's performance.

Conclusions:

• The developed pMUT array enables fast 3D volumetric imaging at low voltages, suitable for wearable applications.
• This technology provides a full volumetric view of deep-tissue structures, aiding in the diagnosis of disorders.
• The findings pave the way for advanced long-term wearable imaging solutions for various deep organs.