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Updated: Sep 21, 2026

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
Published on: March 7, 2018
Facile preparation of Hf3N4 thin films directly used as electrodes for lithium-ion storage
Zhengguang Shi1,2, Geng Yu1,2, Jing Li1,2
1School of Physics, Harbin Institute of Technology, 150001, Harbin, China. hstsai@hit.edu.cn.
Abstract:
Transition-metal nitride thin-film electrodes are potential electrode materials for all-solid-state thin-film lithium-ion batteries. In this study, orthorhombic Hf3N4 thin-film electrodes applied in lithium-ion batteries were fabricated by the magnetron sputtering deposition of Hf followed by N2 plasma immersion and post-annealing for the first time. This electrode material without additives such as binders and conductive agents exhibited a high specific capacity, high cycling stability, and excellent rate performance. At a current density of 0.1 A g-1, the initial discharge capacity was 583.2 mA h g-1 and the stable Coulombic efficiency was 96.6%. At a high current density of 2 A g-1, the Hf3N4 thin-film electrodes could still provide a stable discharge capacity of about 260 mA h g-1 and Coulombic efficiency close to 100%. By analyzing the cyclic voltammetry curves at different scan rates, it was found that the Li+ storage in Hf3N4 thin-film electrodes was mainly contributed by a pseudo-capacitance mechanism.

