Low-voltage-tunable electromechanical photonic directional coupler in silicon nitride for telecom wavelengths

Silicon nitride is a low-loss photonic integrated circuit (PIC) platform. However, silicon nitride also shows small nonlinear optical properties and is dielectric, which makes the implementation of programmability challenging. Typically, the thermo-optic effect is used for this, but modulators based on this effect are often slow and cross talk-limited. Here, we present a different approach to programmability in silicon nitride photonics. Micro-electromechanical elements are added to a photonic directional coupler, forming two H-shaped structures. The coupling can be changed by applying a voltage to electrodes placed onto the H-structure, which are then attracted by an electrostatic force. These suspended directional couplers show an insertion loss of 0.67 dB and demonstrate switching with 1.1±0.1 µs rise times, representing a valuable addition to the thermal photonic modulators in silicon nitride technology that offer higher modulation speeds while keeping a comparable insertion loss.