Silicon-28-Tetrafluoride as an Educt of Isotope-Engineered Silicon Compounds and Bulk Materials for Quantum Systems

This review provides a summary of the existing literature on a crucial raw material for the production of isotopically pure semiconductors, which are essential for the development of second-generation quantum systems. Silicon-28-tetrafluoride (²⁸SiF₄) is used as an educt for several isotope-engineered chemicals, such as silane-28 (²⁸SiH₄) and silicon-28-trichloride (²⁸SiHCl₃), which are needed in the pursuit of various quantum technologies. We are exploring the entire chain from the synthesis of ²⁸SiF₄ to quantum applications. This includes the chemical properties of SiF₄, isotopic enrichment, conversion to silanes, conversion to bulk ²⁸Si and thin films, the physical properties of ²⁸Si (spin neutrality, thermal conductivity, optical properties), and the applications in quantum computing, photonics, and quantum sensing techniques.