Design and Modelling of MEMS Vibrating Internal Ring Gyroscopes for Harsh Environments

Area of Science:

• Mechanical Engineering
• Aerospace Engineering
• Materials Science

Background:

• MEMS vibrating ring gyroscopes are crucial for inertial navigation.
• Harsh environmental conditions pose significant challenges to gyroscope performance.
• Optimizing gyroscope design is essential for reliable operation in extreme settings.

Purpose of the Study:

• To design, model, and comparatively analyze two internal MEMS vibrating ring gyroscopes for harsh environments.
• To investigate the impact of support spring configurations on gyroscope performance.
• To evaluate thermal stability and mode matching for high-temperature applications.

Main Methods:

• Finite Element Analysis (FEA) using Ansys 2023 R1 software.
• Detailed derivation of motion equations for dynamic behavior analysis.
• Electrostatic, modal, and harmonic analyses under varying conditions.

Main Results:

• Design II, featuring sixteen semicircular support springs, exhibited better mode matching and higher resonance frequencies than Design I (eight springs).
• Design II demonstrated superior thermal stability across a temperature range of -100 °C to 100 °C.
• Both designs showed robustness under varying DC voltages and environmental conditions.

Conclusions:

• The internal MEMS vibrating ring gyroscope designs are suitable for harsh conditions, including high temperatures and space applications.
• Design II offers enhanced performance characteristics making it a promising candidate for extreme environments.
• Further research can explore advanced materials and configurations for even greater robustness.