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Magnification calibration of X-ray 3D microscopy using micro-line structures.

Yasushi Azuma1, Kazuhiro Kumagai1,2, Naoki Kunishima3

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Summary

This study calibrated three-dimensional X-ray microscopy (3DXRM) for quantitative measurements. Using scanning electron microscopy (SEM) to evaluate line structures, a magnification calibration factor of 1.01 was achieved, enabling SI-traceable measurements.

Keywords:
X-ray microscopycomputed tomographymagnification calibrationscanning electron microscopystandardization

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Area of Science:

  • Metrology
  • Materials Science
  • Imaging Technology

Background:

  • Three-dimensional X-ray microscopy (3DXRM) is a powerful nondestructive imaging technique for submicrometer-scale structural analysis.
  • Current 3DXRM applications are primarily observational, limiting its use in quantitative evaluation and quality control due to a lack of calibration.
  • Accurate measurements require calibration traceable to the International System of Units (SI).

Purpose of the Study:

  • To establish a method for magnification calibration of 3DXRM for quantitative measurements.
  • To validate prototype standard samples (line structures) for 3DXRM calibration.
  • To assess the feasibility of creating an SI-traceable calibration system for 3DXRM.

Main Methods:

  • Fabricated line structures (LSs) as prototype standard samples for 3DXRM magnification calibration.
  • Evaluated the intervals of the LSs using calibrated cross-sectional scanning electron microscopy (SEM).
  • Compared SEM and 3DXRM evaluation results to determine the magnification calibration factor.

Main Results:

  • A magnification calibration factor of 1.01 was determined for 3DXRM based on SEM-evaluated LS intervals.
  • The LSs were validated as suitable standard samples for 3DXRM calibration.
  • The study demonstrated a feasible route for SI-traceable magnification calibration of 3DXRM.

Conclusions:

  • The developed method enables quantitative measurements using 3DXRM through SI-traceable magnification calibration.
  • This advancement significantly enhances the utility of 3DXRM in quality control and metrology.
  • The findings pave the way for broader adoption of 3DXRM in precision measurement applications.