Super-resolution Fluorescence Microscopy
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Updated: Jun 12, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Yasushi Azuma1, Kazuhiro Kumagai1,2, Naoki Kunishima3
1National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan.
This study calibrated three-dimensional X-ray microscopy (3DXRM) for quantitative measurements. Using scanning electron microscopy (SEM) to evaluate line structures, a magnification calibration factor of 1.01 was achieved, enabling SI-traceable measurements.
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