Magnification calibration of X-ray 3D microscopy using micro-line structures

Area of Science:

• Metrology
• Materials Science
• Imaging Technology

Background:

• Three-dimensional X-ray microscopy (3DXRM) is a powerful nondestructive imaging technique for submicrometer-scale structural analysis.
• Current 3DXRM applications are primarily observational, limiting its use in quantitative evaluation and quality control due to a lack of calibration.
• Accurate measurements require calibration traceable to the International System of Units (SI).

Purpose of the Study:

• To establish a method for magnification calibration of 3DXRM for quantitative measurements.
• To validate prototype standard samples (line structures) for 3DXRM calibration.
• To assess the feasibility of creating an SI-traceable calibration system for 3DXRM.

Main Methods:

• Fabricated line structures (LSs) as prototype standard samples for 3DXRM magnification calibration.
• Evaluated the intervals of the LSs using calibrated cross-sectional scanning electron microscopy (SEM).
• Compared SEM and 3DXRM evaluation results to determine the magnification calibration factor.

Main Results:

• A magnification calibration factor of 1.01 was determined for 3DXRM based on SEM-evaluated LS intervals.
• The LSs were validated as suitable standard samples for 3DXRM calibration.
• The study demonstrated a feasible route for SI-traceable magnification calibration of 3DXRM.

Conclusions:

• The developed method enables quantitative measurements using 3DXRM through SI-traceable magnification calibration.
• This advancement significantly enhances the utility of 3DXRM in quality control and metrology.
• The findings pave the way for broader adoption of 3DXRM in precision measurement applications.