EBSD and TKD analyses using inverted contrast Kikuchi diffraction patterns and alternative measurement geometries

Grzegorz Cios1, Aimo Winkelmann1, Gert Nolze2

  • 1Academic Centre for Materials and Nanotechnology, AGH University of Krakow, al. A. Mickiewicza 30, 30-059 Krakow, Poland.

Ultramicroscopy
|September 25, 2024
PubMed
Summary

Electron backscatter diffraction (EBSD) and transmission Kikuchi diffraction (TKD) patterns with inverted contrast can be accurately indexed. Physics-based simulated master patterns overcome challenges in nanoscale topography and low-tilt geometries.