Analysis of Vibration Characteristics of Spatial Non-Uniform Tensioned Thin-Film Structures Based on the Absolute

Peng Sun1, Jin Huang1, Jiaying Zhang1

  • 1State Key Laboratory of Electromechanical Integrated Manufacturing of High-Performance Electronic Equipments, Xidian University, No. 2 South Taibai Road, Xi'an 710071, China.

Micromachines
|September 28, 2024
PubMed

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