Broadband and low-reflection mid-infrared grating coupler for a perfectly vertical fiber-chip interface

Short-wavelength mid-infrared (SWMIR) silicon photonics has gained significant attention due to its applications in sensing, spectroscopy, and communications. A perfectly vertical grating coupler is a valuable packaging technique that is convenient for chip-to-chip optical interconnects and has low risks of mechanical failure during testing. However, SWMIR grating couplers have fewer periods to tailor the diffracted light, hindering the improvement of bandwidths and backreflections. Herein, we demonstrate a perfectly vertical subwavelength grating coupler by using a modified inverse design approach. The device exhibits a coupling efficiency of -5.9 dB with a 1-dB bandwidth of ∼122 nm and a low backreflection of -19.2 dB at 2200 nm wavelengths. Besides, the device also exhibits exceptional spatial fiber misalignment tolerance. The study underscores the effectiveness of the inverse design strategy in subwavelength grating couplers, charting a path to advance the mid-infrared silicon photonic packaging.