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Electrophoretic Crystallization of Ultrathin High-performance Metal-organic Framework Membranes

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Published on: August 16, 2018

Direct-bonded diamond membranes for heterogeneous quantum and electronic technologies.

Xinghan Guo¹, Mouzhe Xie^1,2, Anchita Addhya¹

¹Pritzker School of Molecular Engineering, University of Chicago, Chicago, IL, 60637, USA.

Nature Communications

|October 10, 2024

Summary

Researchers developed a novel diamond bonding technique to integrate single-crystal diamond with various materials. This breakthrough enables scalable fabrication of advanced diamond-based quantum and electronic devices.

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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

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Last Updated: Jun 10, 2025

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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

Area of Science:

Materials Science
Quantum Technology
Nanotechnology

Background:

Single-crystal diamond offers exceptional properties for quantum and electronic applications.
Heteroepitaxial growth limitations hinder the integration and advancement of diamond-based technologies.

Purpose of the Study:

To develop a versatile and scalable method for integrating single-crystal diamond membranes with diverse substrates.
To enable the creation of novel heterogeneous diamond-based hybrid systems for advanced applications.

Main Methods:

Direct bonding of single-crystal diamond membranes to silicon, fused silica, sapphire, thermal oxide, and lithium niobate.
Customized membrane synthesis, transfer, and dry surface functionalization for minimal contamination.
Fabrication of ultra-thin diamond membranes with controlled thickness and interfacial properties.

Main Results:

Achieved bonded crystalline membranes with thicknesses down to 10 nm and sub-nm interfacial regions.
Measured spin coherence times (T2) of up to 623 ± 21 μs for nitrogen vacancy centers in 150 nm-thick membranes.
Demonstrated integration of nanophotonic cavities and compatibility with Total Internal Reflection Fluorescence (TIRF) microscopy for cellular interfacing.

Conclusions:

The developed bonding process provides a scalable toolkit for synthesizing heterogeneous diamond-based hybrid systems.
This platform facilitates the advancement of diamond-based quantum computing, sensing, and photonic technologies.
Enables interfacing diamond quantum sensors with biological systems for advanced research.