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Updated: Jun 21, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
1State Key Laboratory of Precision Measuring Technology and Instruments, Laboratory of Micro/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, China.
This study introduces a streamlined calibration method for bi-telecentric Phase-Measuring Deflectometry (PMD) systems. The new approach enhances measurement precision and efficiency by using a single flat mirror in three poses, simplifying the process.
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