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  1. Home
  3. Absolute Deflection Measurements In A Micro- And Nano-electromechanical Fabry-perot Interferometry System.
  1. Home
  3. Absolute Deflection Measurements In A Micro- And Nano-electromechanical Fabry-perot Interferometry System.

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Absolute Deflection Measurements in a Micro- and Nano-Electromechanical Fabry-Perot Interferometry System.

Roberto De Alba1,2, Christopher B Wallin1,2, Glenn Holland1

  • 1Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.

Journal of Applied Physics
|October 23, 2024

View abstract on PubMed

Summary
This summary is machine-generated.

This study introduces a novel calibration method for Fabry-Perot laser interferometry systems used with micro- and nano-electromechanical systems (MEMS/NEMS). The technique accurately measures device motion and properties by leveraging nonlinear optical responses for robust calibration.

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Area of Science:

  • Physics
  • Mechanical Engineering
  • Materials Science

Background:

  • Fabry-Perot laser interferometry is a standard technique for analyzing micro- and nano-electromechanical systems (MEMS/NEMS).
  • Current methods rely on the substrate as a reference mirror, encoding device motion in reflected laser power.
  • Existing calibration approaches can be limited by material properties and geometric constraints.

Purpose of the Study:

  • To develop a general and robust calibration method for optical systems interrogating MEMS/NEMS.
  • To enable direct measurement of the system's transfer function by utilizing optical nonlinearity.
  • To provide a calibration scheme independent of MEMS/NEMS material and geometry.

Main Methods:

  • Utilized large-amplitude motion exceeding half the laser wavelength to exploit optical nonlinearity.
  • Developed a method for direct measurement of the motion-to-detected-voltage transfer function.
  • Experimentally validated the technique on silicon nitride and silicon cantilevers, including spatial mapping of deflections.

    • Main Results:

    • Successfully measured vibration amplitudes and equilibrium position changes in MEMS/NEMS devices.
    • Demonstrated spatial mapping of static and dynamic deflection profiles, validated against optical profilometry.
    • Extended the calibration to small-amplitude linear regimes and frequency-domain measurements using a lock-in amplifier.

    Conclusions:

    • The presented calibration scheme is material and geometry independent.
    • The method effectively negates nonlinear optical transduction effects.
    • Enables accurate assessment of excitation forces and MEMS/NEMS material properties through precise vibrational response measurement.