Updated: Jun 9, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Xinyu Fan1, Tengjiang Hu1, Yifei Wang2
1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
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This study presents a novel micro-electromechanical systems (MEMS) safety and arming (S&A) device. The multiphysics-driven MEMS S&A device achieves reliable arming with a compact design and high overload resistance.
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