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Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats & Spheres

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Design, Testing, and Experimental Validation of a Rotary Vibration-Assisted Polishing Device (RVAPD) for Enhanced

Silin Liu^1,2, Yan Gu^1,2, Jieqiong Lin^1,2

¹Jilin Provincial Key Laboratory of Micro-Nano and Ultra-Precision Manufacturing, School of Mechatronic Engineering, Changchun University of Technology, Yan'an Ave 2055, Changchun 130012, China.

|October 26, 2024

Summary

A novel rotary vibration-assisted polishing device (RVAPD) enhances polishing force and material surface quality. This device effectively reduces flaws and improves uniformity in silicon carbide (SiC) polishing.

Keywords:

compliance matrix method compliant mechanism finite element analysis flexure design vibration-assisted polishing

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Area of Science:

Materials Science
Mechanical Engineering
Surface Metrology

Background:

Achieving high-quality surfaces in materials like silicon carbide (SiC) is crucial for advanced applications.
Traditional polishing methods often face limitations in efficiency and defect reduction.
Developing advanced polishing techniques is essential for improving material performance.

Purpose of the Study:

To design and validate a rotary vibration-assisted polishing device (RVAPD) for enhanced material surface quality.
To investigate the conversion of piezoelectric (PZT) linear motion to rotary motion for improved polishing.
To optimize the RVAPD for high-frequency, large-amplitude, non-resonant vibration polishing.

Main Methods:

Theoretical modeling and finite element analysis for structural design and optimization.
Development of a flexible mechanism to convert linear to rotary motion.
Open-loop performance testing and validation through polishing experiments on SiC.

Main Results:

The RVAPD successfully converts PZT linear motion to rotary motion, enhancing polishing force.
Optimized structure and flexible mechanism (lever and Hoeckens connection) improve vibration parameters and motion efficiency.
Significant reduction in surface flaws and improved uniformity were observed on SiC surfaces.

Conclusions:

The designed RVAPD meets high-frequency and large-amplitude non-resonant vibration polishing requirements.
The device offers a wide range of adjustable polishing parameters.
The RVAPD and proposed method significantly enhance SiC surface quality, demonstrating its effectiveness.