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Updated: Jun 9, 2025

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Xuge Fan1,2,3, Chang He4, Jie Ding5
1Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, 100081, Beijing, China. xgfan@bit.edu.cn.
Graphene
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