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Updated: Jun 9, 2025
Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Graphene MEMS and NEMS
Xuge Fan1,2,3, Chang He4, Jie Ding5
1Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, 100081, Beijing, China. xgfan@bit.edu.cn.
Abstract:
Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS, and sensor applications.
