Single-step and parallel high-speed fabrication for Au micro-/nanostructures

Patterns fabricated with Au nanoparticles (Au NPs) exhibit significant potential in fields such as micro-optics and bioelectronics. However, the current manufacturing methods still suffer from complex processes and low efficiency. In this work, we propose a high-speed manufacturing method for Au micro-/nanostructures based on spatiotemporal focusing and maskless lithography, achieving a throughput of 0.5 mm²/min. The surface electric field enhancement of the structure was confirmed using Raman spectroscopy, indicating that this method holds significant promise for metasurface, biosensing, and plasmonic chemistry.