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Updated: Jun 6, 2025

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
Published on: January 27, 2017
Maskless grayscale lithography enables precise fabrication of multi-plane light conversion (MPLC) devices for mode-division multiplexing (MDM) communications. This single-exposure technique reduces errors, achieving low insertion loss and mode crosstalk for high-speed optical signals.
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