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Updated: Jun 6, 2025

Quantitative Analysis of Vacuum Induction Melting by Laser-induced Breakdown Spectroscopy
Published on: June 10, 2019
Investigation of Laser Ablation Quality Based upon Entropy Analysis of Data Science
Chien-Chung Tsai1, Tung-Hon Yiu1
1Department of Semiconductor and Electro-Optical Technology, Minghsin University of Science and Technology, Hsinchu 30401, Taiwan.
Abstract:
Laser ablation is a vital material removal technique, but current methods lack a data-driven approach to assess quality. This study proposes a novel method, employing information entropy, a concept from data science, to evaluate laser ablation quality. By analyzing the randomness associated with the ablation process through the distribution of a probability value (r), we quantify the uncertainty (entropy) of the ablation. Our research reveals that higher energy levels lead to lower entropy, signifying a more controlled and predictable ablation process. Furthermore, using an interval time closer to the baseline value improves the ablation consistency. Additionally, the analysis suggests that the energy level has a stronger correlation with entropy than the baseline interval time (bit). The entropy decreased by 6.32 from 12.94 at 0.258 mJ to 6.62 at 0.378 mJ, while the change due to the bit was only 2.12 (from 10.84 at bit/2 to 8.72 at bit). This indicates that energy is a more dominant factor for predicting ablation quality. Overall, this work demonstrates the feasibility of information entropy analysis for evaluating laser ablation, paving the way for optimizing laser parameters and achieving a more precise material removal process.
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