A Review on Resonant MEMS Electric Field Sensors

Electric field sensors (EFSs) are widely used in various fields, particularly in accurately assessing atmospheric electric fields and high-voltage power lines. Precisely detecting electric fields enhances the accuracy of weather forecasting and contributes to the safe operation of power grids. This paper comprehensively reviews the development of micro-electromechanical system (MEMS) resonant EFSs, including theoretical analysis, working principles, and applications. MEMS resonant EFSs have developed into various structures over the past decades. They have been reported to measure electric field strength by detecting changes in the induced charge on the electrodes. Significant advancements include diverse driving and sensing structures, along with improved dynamic range, sensitivity, and resolution. Recently, mode localization has gained attention and has been applied to electric field sensing. This paper reviews the performances and structures of MEMS resonant EFSs over recent decades and highlights recent advances in weakly coupled resonant EFSs, offering comprehensive guidance for researchers.