A Review of Three-Dimensional Electric Field Sensors

Xiaonan Li1, Yu Gu1, Zehao Li1

  • 1School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China.

Micromachines
|July 30, 2025
PubMed
Summary

Three-dimensional electric field sensors (3D EFSs) offer comprehensive electric field measurement for diverse applications. This review details advancements in DC field mill, electro-optic, capacitive, and MEMS sensors, analyzing their principles, designs, and calibration.

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