Multilevel Cu-LIG Tactile Sensing Arrays for 3D Touch Human-Machine Interaction

High-performance flexible tactile sensors have attracted significant attention in the domains of human-machine interactions. However, the efficient fabrication of sensors with highly sensitive responses over a broad load range still remains a challenge. Here, we propose a one-step laser writing route to construct a distinctive multilevel piezoresistive structure, consisting of Cu nanoparticle-doped graphene protrusions and surrounding porous Cu sheets. This multilevel structure enables the assembled tactile sensors to exhibit superior sensitivity at both low-pressure (1468 kPa^-1 at 0-200 kPa) and high-pressure (1345 kPa^-1 at 600-800 kPa) stimulations. Its enhancement mechanism for piezoresistive sensing has been investigated. The programmable laser writing process facilitates the development of human-machine interaction devices that recognize multidimensional gestures such as sliding, clicking, and pressing. This advancement serves to promote the development of high-performance interactive sensing technologies.