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Updated: May 3, 2026

Fabrication of Carbon Nanotube High-Frequency Nanoelectronic Biosensor for Sensing in High Ionic Strength Solutions
Published on: July 22, 2013
Establishing an end-to-end workflow for SNSPD fabrication and characterization.
Shuyu Dong1,2, Darren Ming Zhi Koh3, Filippo Martinelli2,4
1School of Electrical and Electronic Engineering, Nanyang Technological University, 639798, Singapore, Singapore.
Researchers developed an in-house workflow for fabricating superconducting nanowire single-photon detectors (SNSPDs). These custom-made SNSPDs show performance comparable to commercial devices, meeting high demand.
Area of Science:
- Quantum Optics and Photonics
- Materials Science and Nanotechnology
- Superconducting Devices
Background:
- Superconducting nanowire single-photon detectors (SNSPDs) are crucial for quantum technologies, astronomy, and communication.
- High demand for SNSPDs outstrips commercial production capabilities.
- In-house fabrication offers customization and tailored performance for specific applications.
Purpose of the Study:
- To establish an end-to-end workflow for SNSPD fabrication and characterization.
- To identify and optimize key fabrication parameters for SNSPD development.
- To enable custom SNSPD manufacturing for diverse scientific and technological needs.
Main Methods:
- Developed a comprehensive workflow encompassing superconducting film deposition, nanowire patterning, and device integration.
- Implemented characterization techniques for evaluating SNSPD performance.
- Focused on optimizing critical process parameters for reliable fabrication.
Main Results:
- Successfully fabricated SNSPDs using an ab initio developed workflow.
- Achieved device performance comparable to commercial SNSPDs at 1550 nm wavelength.
- Demonstrated suitability for telecommunication and integrated quantum systems.
Conclusions:
- An in-house SNSPD fabrication workflow can yield high-performance detectors.
- The developed process provides a viable alternative to commercial sourcing for specialized needs.
- This work accelerates the adoption and application of SNSPD technology across various fields.
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