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Updated: Jun 4, 2025

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Published on: May 24, 2020
Low-Frequency Noise Related to the Scattering Effect in p-Type Copper(I) Oxide Thin-Film Transistors
Jaewook Yoo1, Seohyeon Park1, Hongseung Lee1
1Department of Electronic Engineering, Jeonbuk National University, 567 Baekje-daero, Deokjin-gu, Jeonju 54896, Republic of Korea.
Abstract:
In this study, we investigate the origins of low-frequency noise (LFN) and 1/f noise in Cu2O thin-film transistors (TFTs). The static direct current (DC) I-V characterization demonstrates that the channel resistance (Rch) contributes significantly to mobility degradation in the TFTs, with channel thickness (tch) controlled through the plasma-enhanced atomic layer deposition (PEALD) process. The 1/f noise followed the Hooge mobility fluctuation (HMF) model, and it was observed that both Coulomb and phonon scattering within the channel, which increased with a decrease in tch, contributed simultaneously. Increased Rch contributed more significantly to the 1/f noise than to the contact resistance (RC), as evidenced by the RC configuration of the measurements, which also revealed that RC depends upon tch. This study demonstrates that tch is a major noise source in Cu2O TFTs and presents guidelines for the development of Cu2O TFTs and potential high-mobility p-type oxide semiconductors.
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