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Fully Integrated MEMS Micropump and Miniaturized Mass Flow Sensor as Basic Components for a Microdosing System.

Martin Seidl1, Gabriele Schrag1

  • 1Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, 80333 Munich, Germany.

Micromachines
|January 8, 2025
PubMed
Summary

This study introduces a novel miniaturized micropump and mass flow sensor for microfluidic systems. These components enable precise gas pumping and flow measurement perpendicular to the chip surface, advancing mobile microfluidic applications.

Keywords:
MEMSelectrostatic actuationelectrostatic pull-inintegratedmass flow sensormicrodosingmicrofluidicsmicropump

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Area of Science:

  • Microsystems Engineering
  • Fluid Dynamics
  • Sensor Technology

Background:

  • Miniaturized microfluidic actuation systems are limited in mobile devices despite actuator advancements.
  • Existing systems lack integration and efficient pumping/sensing for gaseous media.

Purpose of the Study:

  • To develop an integrated microfluidic platform for microfluidic systems, particularly microdosing.
  • To present a novel micropump and mass flow sensor concept for mobile applications.

Main Methods:

  • Developed a micropump utilizing active valves and electrostatic drive principles.
  • Designed a mass flow sensor based on hot-wire anemometry integrated into a through-hole.
  • Fabricated prototypes with dimensions of 1.86 mm × 1.86 mm × 0.3 mm (pump) and 1.4 mm × 1.4 mm × 0.4 mm (sensor).

Main Results:

  • Prototypes achieve gaseous media pumping up to 110 μL/min.
  • Pumping direction is perpendicular to the chip surface.
  • Flow sensor exhibits detection thresholds around 10 μL/min and ranges up to 20 mL/min.

Conclusions:

  • The developed micropump and flow sensor offer a basis for an integrated microfluidic development platform.
  • The perpendicular flow capability enables direct integration with the micropump.
  • The system shows potential for microdosing and other microfluidic applications in mobile devices.