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Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors
Yameng Shan1,2, Lei Qian2, Kaixuan He3
1School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China.
Micromachines
|January 8, 2025
Summary
This study integrates piezoresistive sensors onto electrostatic MEMS scanning micromirrors for precise angle feedback. Optimized sensor design enables accurate, closed-loop control of micromirror deflection.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Sensor Technology
- Optical Engineering
Background:
- MEMS scanning micromirrors need real-time angle feedback for stable operation.
- Existing angle sensing methods may face challenges with electrostatic micromirrors.
Purpose of the Study:
- To propose and validate an integrated piezoresistive sensor for electrostatic MEMS micromirrors.
- To enable accurate angle detection and closed-loop feedback control.
Main Methods:
- Designed a double-layer structure with integrated piezoresistive sensors on the torsion axis.
- Utilized a multi-layer bonding process for vertical comb-driven actuation.
- Optimized sensor size and layout to minimize crosstalk and enhance sensitivity.
Main Results:
- Fabricated a 1 mm diameter MEMS 2D scanning micromirror.
- Achieved torsional resonance frequencies of 17.68 kHz (fast axis) and 2.225 kHz (slow axis).
- Demonstrated optical scanning angles of 55° and 45° with specific driving voltages.
- Obtained a sensor sensitivity of 13.87 mV/V° with a linear output voltage response.
Conclusions:
- The integrated piezoresistive sensor effectively detects micromirror deflection.
- The optimized design facilitates closed-loop feedback control for electrostatic MEMS micromirrors.
- This approach enhances the stability and accuracy of MEMS scanning systems.
