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Design and Implementation of a CMOS-MEMS Out-of-Plane Detection Gyroscope.

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  • 1Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China.

Micromachines
|January 8, 2025
PubMed
Summary
This summary is machine-generated.

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This study presents a novel Y-axis micro-electro-mechanical systems (MEMS) gyroscope using CMOS-MEMS technology. Optimized design and fabrication achieved high performance for attitude control and inertial navigation systems.

Area of Science:

  • Micro-electro-mechanical systems (MEMS)
  • Sensor Technology
  • Integrated Circuit Design

Background:

  • MEMS gyroscopes are essential for attitude control and inertial navigation due to their compact size, low power, and high reliability.
  • Existing MEMS gyroscopes require further optimization for enhanced performance in demanding applications.

Purpose of the Study:

  • To design, simulate, and fabricate a Y-axis MEMS gyroscope utilizing CMOS-MEMS technology.
  • To optimize the gyroscope's structural dimensions for improved performance.
  • To validate the design through comprehensive simulations and experimental testing.

Main Methods:

  • Utilized CMOS-MEMS technology for gyroscope fabrication.
  • Employed a multi-objective genetic algorithm for structural dimension optimization.
Keywords:
CMOS-MEMSchip testingfinite element analysisout-of-plane gyro

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  • Performed modal, harmonic response, and range simulations.
  • Conducted chip testing to verify static capacitance and frequency characteristics.

    • Main Results:

    • The fabricated chip measures 1.2 mm × 1.3 mm.
    • Simulation results showed driving and detecting frequencies of 9215.5 Hz and 9243.5 Hz, respectively.
    • Achieved high Q-factors (83,790 and 46,085), mechanical sensitivity of 4.87 × 10-11 m/°/s, and an operational range of ±600°/s.
    • Experimental results showed a 1.9% error between measured and simulated frequency characteristics.

    Conclusions:

    • The developed Y-axis MEMS gyroscope demonstrates high performance and accuracy.
    • The design provides a foundation for integrating gyroscope structure and circuitry.
    • This work contributes to advancements in miniaturized inertial sensing technology.