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Design and Testing of MEMS Component for Electromagnetic Pulse Protection.

Shiyi Li1,2,3, Hengzhen Feng1,3, Wenzhong Lou1,2,3

  • 1School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China.

Sensors (Basel, Switzerland)
|January 11, 2025
PubMed
Summary
This summary is machine-generated.

This study introduces a novel MEMS electromagnetic energy-releasing component using corona discharge for advanced micro-electronic protection. The device significantly reduces residual pulse current, enhancing safety and integration in microelectronics.

Keywords:
MEMSelectromagnetic energy diversionresponse characterizationsafety protectionstrong electromagnetic environment

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Electromagnetic compatibility
  • Solid-state physics

Background:

  • Growing demand for high-safety, high-integration, and lightweight micro- and nano-electronic components.
  • Limitations of traditional device-level protection methods for electromagnetic energy.
  • Need for miniaturized protection solutions compatible with integrated circuits.

Purpose of the Study:

  • To innovatively design and verify the working performance of a MEMS electromagnetic energy-releasing component based on corona discharge theory.
  • To demonstrate the feasibility of integrating complex circuit protection systems at the micro-nanometer scale.
  • To analyze the protective effect of the developed MEMS component against strong electromagnetic pulses.

Main Methods:

  • Design of a MEMS electromagnetic energy-releasing component utilizing corona discharge principles.
  • Verification through a combination of simulation, static experiments, and dynamic testing.
  • Characterization tests to thoroughly analyze the component's performance and effect.

Main Results:

  • The MEMS component demonstrated a significant protective effect against strong electromagnetic pulses.
  • Pulse breakdown voltage increased exponentially with pulse injection voltage.
  • Residual pulse current was reduced by one-third to one-half of the original value.
  • In a DC environment, the needle-needle structure exhibited a breakdown voltage of 144 V and an on-time of approximately 0.5 ms.

Conclusions:

  • The developed MEMS electromagnetic energy-releasing component effectively protects microelectronic systems from electromagnetic energy threats.
  • The micro-nanometer processing technology enables the integration of advanced protection at the chip level, reducing size from centimeter to micron.
  • The component offers a promising solution for enhancing the safety and integration of next-generation electronic devices.