Design and Testing of MEMS Component for Electromagnetic Pulse Protection

Area of Science:

• Microelectromechanical Systems (MEMS)
• Electromagnetic compatibility
• Solid-state physics

Background:

• Growing demand for high-safety, high-integration, and lightweight micro- and nano-electronic components.
• Limitations of traditional device-level protection methods for electromagnetic energy.
• Need for miniaturized protection solutions compatible with integrated circuits.

Purpose of the Study:

• To innovatively design and verify the working performance of a MEMS electromagnetic energy-releasing component based on corona discharge theory.
• To demonstrate the feasibility of integrating complex circuit protection systems at the micro-nanometer scale.
• To analyze the protective effect of the developed MEMS component against strong electromagnetic pulses.

Main Methods:

• Design of a MEMS electromagnetic energy-releasing component utilizing corona discharge principles.
• Verification through a combination of simulation, static experiments, and dynamic testing.
• Characterization tests to thoroughly analyze the component's performance and effect.

Main Results:

• The MEMS component demonstrated a significant protective effect against strong electromagnetic pulses.
• Pulse breakdown voltage increased exponentially with pulse injection voltage.
• Residual pulse current was reduced by one-third to one-half of the original value.
• In a DC environment, the needle-needle structure exhibited a breakdown voltage of 144 V and an on-time of approximately 0.5 ms.

Conclusions:

• The developed MEMS electromagnetic energy-releasing component effectively protects microelectronic systems from electromagnetic energy threats.
• The micro-nanometer processing technology enables the integration of advanced protection at the chip level, reducing size from centimeter to micron.
• The component offers a promising solution for enhancing the safety and integration of next-generation electronic devices.