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Updated: Jun 3, 2025

Probing C84-embedded Si Substrate Using Scanning Probe Microscopy and Molecular Dynamics
Published on: September 28, 2016
Pai Li1, Chao Zhao2,3, Yun Liu1
1State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China.
Researchers uncovered a phase transition in silicon surface step profiles, moving from random to zigzag patterns as miscut angle decreases. This finding explains step polymorphism on vicinal silicon (Si)(001) surfaces.
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