Scanning Electron Microscopy
Transmission Electron Microscopy
Super-resolution Fluorescence Microscopy
Overview of Electron Microscopy
Preparation of Samples for Electron Microscopy
Overview of Microscopy Techniques
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Updated: Jun 3, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Xinyu Sun1,2,3,4, Guangnan Yao2,4, Rui Zheng2,4
1College of Optical and Electronic Technology, China Jiliang University, Hangzhou, Zhejiang 310018, China.
Low-energy electron beam lithography (iEBL) now enables high-precision quasi-3D nanofabrication. This technique creates complex structures and contamination-free metal nanostructures, expanding manufacturing capabilities.
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