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Updated: Jun 2, 2025

Fabrication of Schottky Diodes on Zn-polar BeMgZnO/ZnO Heterostructure Grown by Plasma-assisted Molecular Beam Epitaxy
Published on: October 23, 2018
κ/β-Ga2O3 Type-II Phase Heterojunction
Yi Lu1, Patsy A Miranda Cortez1, Xiao Tang1
1Advanced Semiconductor Laboratory, Electrical and Computer Engineering Program, Division of Computer, Electrical, and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal, 23955-6900, Kingdom of Saudi Arabia.
Abstract:
Ultrawide-bandgap gallium oxide (Ga2O3) holds immense potential for crucial applications such as solar-blind photonics and high-power electronics. Although several Ga2O3 polymorphs, i.e., α, β, γ, δ, ε, and κ phases, have been identified, the band alignments between these phases have been largely overlooked due to epitaxy challenges and inadvertent neglect. Despite having similar stoichiometry, heterojunctions involving different phases may exhibit band offsets. Here, β-Ga2O3/κ-Ga2O3-stacked "phase heterojunction" is demonstrated experimentally. This phase heterojunction has a sharp and well-defined interface, and subsequent measurements reveal an unbeknown type-II band alignment with significant valence/conduction band offsets of ≈0.65 eV/0.71 eV. This alignment is promising for self-powered deep ultraviolet (DUV) signal detection, necessitating an internal electric field near the junction and matching the absorption properties for effective electron-hole separation. The fabricated phase heterojunction photodetector displays a responsivity of three orders of magnitude higher at 17.8 mA W-1, with improved response times (rise time ≈0.21 s, decay time ≈0.53 s) under DUV illumination and without external bias in comparison to the bare β-Ga2O3 and κ-Ga2O3 photodetectors, confirming the strong interfacial electrical field. This study provides profound insight into Ga2O3/Ga2O3 heterojunction interfaces with different polymorphs, allowing the use of phase heterojunctions to advance electronic device applications.
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