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Updated: Jun 2, 2025

A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
High-performance van der Waals stacked transistors based on ultrathin GaPS4 dielectrics
Zhilin Xiao1,2, Binghuan Zeng1,2, Fang Xu1,2
1School of Physics and Materials Science, Nanchang University, Nanchang, Jiangxi, 330031, People's Republic of China. liaoxiaxia@ncu.edu.cn.
Gallium thiophosphate (GaPS4) is a new wide bandgap semiconductor material for high-performance transistors. Its few-layer form acts as an excellent high-κ gate dielectric in 2D field-effect transistors (FETs).
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- High-performance field-effect transistors (FETs) require advanced gate dielectric materials.
- Two-dimensional (2D) materials offer unique electronic properties for next-generation devices.
Purpose of the Study:
- To synthesize and characterize few-layer gallium thiophosphate (GaPS4) as a potential high-κ gate dielectric.
- To fabricate and evaluate 2D van der Waals heterostructure FETs using GaPS4.
Main Methods:
- Mechanical exfoliation of bulk GaPS4 to obtain few-layer flakes.
- Fabrication of 2D FETs with GaPS4 as the dielectric and MoS2 as the channel.
- Electrical characterization of the fabricated FETs.
Main Results:
- Few-layer GaPS4 exhibits a relative dielectric constant of ~5.3.
- Fabricated FETs demonstrate a high on-off ratio (>10^7) and low subthreshold swing (80 mV/decade).
- Atomically smooth GaPS4 flakes were utilized as the top-gate dielectric.
Conclusions:
- Few-layer GaPS4 is a promising high-κ dielectric material for 2D transistors.
- This research contributes to the development of high-κ 2D dielectrics.
- The findings pave the way for advanced electronic device fabrication.
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